This course provides an overview of the different processes involved in micro- and nanoscale fabrication techniques in the context of medical electronic device design, including wearable and implantable sensors and brain-machine interface devices. Techniques to be covered include deposition, etching, lithography, nano patterning, printing and etching, materials selection for medical devices, materials characterization. Design case studies will be discussed.

Survey of fabrication and processing technologies in industrial sectors, such as semiconductor, biotechnology, and energy. Chemistry and transport of electronic and energy device fabrication. Solid state materials, electronic devices and chemical processes including crystal growth, chemical vapor deposition, etching, oxidation, doping, diffusion, thin film deposition, plasma processing. Micro and nanopatterning involving photolithography, unconventional soft lithography and self assembly.